Abstract
Outstanding features of micromachined calorimetric sensors make these devices well suited for measuring
the thermal properties of resting liquids. Based on a novel 3D analytical model, essential design rules
for the realization of optimized membrane-based thermal property sensors can be derived. These theoretical
results are verified by measurements obtained from a device prototype.
| Original language | English |
|---|---|
| Title of host publication | Proceedings Eurosensors XXII, Dresden, Germany, 7-10 Sept. 2008 |
| Pages | 76-79 |
| Number of pages | 4 |
| Publication status | Published - 2008 |
Fields of science
- 202036 Sensor systems