Characterization of the element distribution within TiN coatings with SIMS

Thomas Kolber, Kurt Piplits, Leopold Palmetshofer, H. Hutter

Research output: Other contribution

Original languageEnglish
Number of pages7
Volume135
DOIs
Publication statusPublished - 2000

Fields of science

  • 103 Physics, Astronomy
  • 103009 Solid state physics
  • 103011 Semiconductor physics
  • 103017 Magnetism
  • 103018 Materials physics
  • 210006 Nanotechnology
  • 103040 Photonics
  • 202032 Photovoltaics

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