Characterization of metalorganic chemical vapor deposition growth of cubic GaN by in situ x-ray diffraction

Helmut Sitter, K. Lischka, J. Bethke, A. Kharchenko, Alberta Bonanni, Klaus Schmidegg

Research output: Contribution to journal › Article › peer-review

Original language	English
Number of pages	6
Journal	Journal of Vacuum Science and Technology B
Volume	22
DOIs	https://doi.org/10.1116/1.1768191
Publication status	Published - Apr 2004

Fields of science

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title = "Characterization of metalorganic chemical vapor deposition growth of cubic GaN by in situ x-ray diffraction",

author = "Helmut Sitter and K. Lischka and J. Bethke and A. Kharchenko and Alberta Bonanni and Klaus Schmidegg",

year = "2004",

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language = "English",

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T1 - Characterization of metalorganic chemical vapor deposition growth of cubic GaN by in situ x-ray diffraction

AU - Sitter, Helmut

AU - Lischka, K.

AU - Bethke, J.

AU - Kharchenko, A.

AU - Bonanni, Alberta

AU - Schmidegg, Klaus

PY - 2004/4

Y1 - 2004/4

U2 - 10.1116/1.1768191

DO - 10.1116/1.1768191

M3 - Article

SN - 1520-8567

VL - 22

JO - Journal of Vacuum Science and Technology B

JF - Journal of Vacuum Science and Technology B

ER -