Original language | English |
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Title of host publication | Micromanufacturing Engineering and Technology |
Editors | Yi Qin |
Pages | 705-714 |
Number of pages | 10 |
DOIs | |
Publication status | Published - 2015 |
Fields of science
- 210006 Nanotechnology
- 103020 Surface physics
- 103021 Optics
JKU Focus areas
- Engineering and Natural Sciences (in general)