Carbon precipitation and diffusion in SiGeC alloys under silicon self-interstitial injection

A. Coati, Julian Stangl, Günther Bauer, L. Lazzarini, D. De Salvador, James C. Sturm, M. Berti, M.S. Carroll, A.V. Drigo, E. Napolitani

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)667–672
Number of pages6
JournalApplied Physics A
Volume75
Issue number6
DOIs
Publication statusPublished - May 2002

Fields of science

  • 103 Physics, Astronomy
  • 103009 Solid state physics
  • 103011 Semiconductor physics
  • 103017 Magnetism
  • 103018 Materials physics
  • 103040 Photonics
  • 202032 Photovoltaics
  • 210006 Nanotechnology

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