"Carbon Co-Doping of Si1-xGex:B Layers: Suppression of Transient Enhanced Diffusion"

Michael Mühlberger, Friedrich Schäffler

Research output: Contribution to journal › Article › peer-review

Original languageEnglish
JournalCurrent Developments of Microelectronics
Publication statusPublished - 1999

Fields of science

  • 103 Physics, Astronomy
  • 103009 Solid state physics
  • 103011 Semiconductor physics
  • 103017 Magnetism
  • 103018 Materials physics
  • 103040 Photonics
  • 202032 Photovoltaics
  • 210006 Nanotechnology

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  • SDG 7 - Affordable and Clean Energy

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