Calibration of an XRF Spectrometer for Thickness Determination of Ultra Thin Metal Layers on Polymers by RBS

Markus Draxler, Martin Bergsmann, Friedrich Kastner, R. Einsiedler, Peter Bauer, S. Zoister

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	45th Annual Technical Conference Proceedings, Society of Vacuum Coaters
Number of pages	30
Publication status	Published - 2002

Fields of science

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title = "Calibration of an XRF Spectrometer for Thickness Determination of Ultra Thin Metal Layers on Polymers by RBS",

author = "Markus Draxler and Martin Bergsmann and Friedrich Kastner and R. Einsiedler and Peter Bauer and S. Zoister",

year = "2002",

language = "English",

booktitle = "45th Annual Technical Conference Proceedings, Society of Vacuum Coaters",

}

TY - GEN

T1 - Calibration of an XRF Spectrometer for Thickness Determination of Ultra Thin Metal Layers on Polymers by RBS

AU - Draxler, Markus

AU - Bergsmann, Martin

AU - Kastner, Friedrich

AU - Einsiedler, R.

AU - Bauer, Peter

AU - Zoister, S.

PY - 2002

Y1 - 2002

M3 - Conference proceedings

BT - 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters

ER -