Ar+ Laser-Induced Chemical Etching of Molybdenum in Chlorine Atmosphere

Peter Mogyorosi; Klaus Piglmayer; Dieter Bäuerle

doi:10.1016/0039-6028(89)90047-2

Ar+ Laser-Induced Chemical Etching of Molybdenum in Chlorine Atmosphere

Peter Mogyorosi, Klaus Piglmayer, Dieter Bäuerle

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	232-244
Number of pages	13
Journal	Surface Science
Volume	208
Issue number	1-2
DOIs	https://doi.org/10.1016/0039-6028(89)90047-2
Publication status	Published - 02 Jan 1989

Fields of science

103016 Laser physics
103020 Surface physics
103 Physics, Astronomy
103008 Experimental physics
103021 Optics
103023 Polymer physics

JKU Focus areas

Engineering and Natural Sciences (in general)

Access to Document

10.1016/0039-6028(89)90047-2

Cite this

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title = "Ar+ Laser-Induced Chemical Etching of Molybdenum in Chlorine Atmosphere",

author = "Peter Mogyorosi and Klaus Piglmayer and Dieter B{\"a}uerle",

year = "1989",

month = jan,

day = "2",

doi = "10.1016/0039-6028(89)90047-2",

language = "English",

volume = "208",

pages = "232--244",

journal = "Surface Science",

issn = "1879-2758",

publisher = "Elsevier B.V.",

number = "1-2",

}

TY - JOUR

T1 - Ar+ Laser-Induced Chemical Etching of Molybdenum in Chlorine Atmosphere

AU - Mogyorosi, Peter

AU - Piglmayer, Klaus

AU - Bäuerle, Dieter

PY - 1989/1/2

Y1 - 1989/1/2

UR - https://www.scopus.com/pages/publications/0343348046

U2 - 10.1016/0039-6028(89)90047-2

DO - 10.1016/0039-6028(89)90047-2

M3 - Article

SN - 1879-2758

VL - 208

SP - 232

EP - 244

JO - Surface Science

JF - Surface Science

IS - 1-2

ER -

Ar+ Laser-Induced Chemical Etching of Molybdenum in Chlorine Atmosphere

Fields of science

JKU Focus areas

Access to Document

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Cite this