| Original language | English |
|---|---|
| Title of host publication | IEEE Sensors Conference 2005, Irvine, CA |
| Number of pages | 4 |
| Publication status | Published - 2005 |
Fields of science
- 202036 Sensor systems
Analysis of spurious effects in membrane-based micromachined thermal conductivity sensors
Jochen Kuntner, Bernhard Jakoby, Roman Beigelbeck, Franz Kohl
Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review