An Inkjet Printed ZNO Based Gas Sensor on a Flexible High Temperature Substrate for NO2 Sensing

Marcel Knoll; Christina Offenzeller; Bernhard Jakoby; Pavel Kulha; Alexandr Laposa; Wolfgang Hilber

An Inkjet Printed ZNO Based Gas Sensor on a Flexible High Temperature Substrate for NO2 Sensing

Marcel Knoll
, Christina Offenzeller
, Bernhard Jakoby
, Pavel Kulha
, Alexandr Laposa
, Wolfgang Hilber

Institute of Microelectronics and Microsensors

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Abstract

In this work we demonstrate the realization of a simple and low cost NO2 gas sensor on a flexible polymer substrate. The sensor was fabricated using inkjet printing and hydrothermal growth and consists of a printed interdigital structure on which a sensitive zinc oxide layer was grown. The chosen growing process does not require an additional seed layer, which allows to directly grow the zinc oxide layer on the substrate. Furthermore, the operating temperature was intrinsically achieved with an inkjet printed heater, which is located at the backside of the sensor.

Original language	English
Title of host publication	Proceedings Transducers 2019
Number of pages	4
Publication status	Published - Jun 2019

Fields of science

202019 High frequency engineering
202021 Industrial electronics
202036 Sensor systems
203017 Micromechanics
202 Electrical Engineering, Electronics, Information Engineering
202027 Mechatronics
202028 Microelectronics
202037 Signal processing

JKU Focus areas

Digital Transformation

Cite this

@inproceedings{18e51af41fb0490d8ea163b9f2a3ebcd,

title = "An Inkjet Printed ZNO Based Gas Sensor on a Flexible High Temperature Substrate for NO2 Sensing",

abstract = "In this work we demonstrate the realization of a simple and low cost NO2 gas sensor on a flexible polymer substrate. The sensor was fabricated using inkjet printing and hydrothermal growth and consists of a printed interdigital structure on which a sensitive zinc oxide layer was grown. The chosen growing process does not require an additional seed layer, which allows to directly grow the zinc oxide layer on the substrate. Furthermore, the operating temperature was intrinsically achieved with an inkjet printed heater, which is located at the backside of the sensor.",

author = "Marcel Knoll and Christina Offenzeller and Bernhard Jakoby and Pavel Kulha and Alexandr Laposa and Wolfgang Hilber",

year = "2019",

month = jun,

language = "English",

booktitle = "Proceedings Transducers 2019",

}

TY - GEN

T1 - An Inkjet Printed ZNO Based Gas Sensor on a Flexible High Temperature Substrate for NO2 Sensing

AU - Knoll, Marcel

AU - Offenzeller, Christina

AU - Jakoby, Bernhard

AU - Kulha, Pavel

AU - Laposa, Alexandr

AU - Hilber, Wolfgang

PY - 2019/6

Y1 - 2019/6

N2 - In this work we demonstrate the realization of a simple and low cost NO2 gas sensor on a flexible polymer substrate. The sensor was fabricated using inkjet printing and hydrothermal growth and consists of a printed interdigital structure on which a sensitive zinc oxide layer was grown. The chosen growing process does not require an additional seed layer, which allows to directly grow the zinc oxide layer on the substrate. Furthermore, the operating temperature was intrinsically achieved with an inkjet printed heater, which is located at the backside of the sensor.

AB - In this work we demonstrate the realization of a simple and low cost NO2 gas sensor on a flexible polymer substrate. The sensor was fabricated using inkjet printing and hydrothermal growth and consists of a printed interdigital structure on which a sensitive zinc oxide layer was grown. The chosen growing process does not require an additional seed layer, which allows to directly grow the zinc oxide layer on the substrate. Furthermore, the operating temperature was intrinsically achieved with an inkjet printed heater, which is located at the backside of the sensor.

M3 - Conference proceedings

BT - Proceedings Transducers 2019

ER -