TY - GEN
T1 - An Efficient Method for Modeling Planar Interdigitated Electrodes for Capacitive Sensing
AU - Schaur, Stefan
AU - Jakoby, Bernhard
PY - 2011
Y1 - 2011
N2 - Interdigitated electrodes represent a commonly used planar structure when it comes to implementing capacitive
sensors. The calculation of the created electric fields, however, is very complicated as soon as cover layers are involved. We present a simple semi-analytical approach, which yields approximate expressions for the capacitance between the electrodes. The method can be easily adapted to geometries with multiple cover layers. As an example, the sensitivity of the capacitance to changes in the permittivity for alternate wiring schemes of electrodes is discussed.
AB - Interdigitated electrodes represent a commonly used planar structure when it comes to implementing capacitive
sensors. The calculation of the created electric fields, however, is very complicated as soon as cover layers are involved. We present a simple semi-analytical approach, which yields approximate expressions for the capacitance between the electrodes. The method can be easily adapted to geometries with multiple cover layers. As an example, the sensitivity of the capacitance to changes in the permittivity for alternate wiring schemes of electrodes is discussed.
UR - http://www.scopus.com/inward/record.url?scp=84856912938&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2011.6127260
DO - 10.1109/ICSENS.2011.6127260
M3 - Conference proceedings
SN - 978-1-4244-9288-6
T3 - Proceedings of IEEE Sensors
SP - 1970
EP - 1973
BT - 2011 IEEE Sensors Proceedings
PB - IEEE
CY - 445 Hoes Lane Piscataway, NJ 08855-1331 USA
ER -