An Efficient Method for Modeling Planar Interdigitated Electrodes for Capacitive Sensing

Stefan Schaur, Bernhard Jakoby

Research output: Chapter in Book/Report/Conference proceedingConference proceedingspeer-review

Abstract

Interdigitated electrodes represent a commonly used planar structure when it comes to implementing capacitive sensors. The calculation of the created electric fields, however, is very complicated as soon as cover layers are involved. We present a simple semi-analytical approach, which yields approximate expressions for the capacitance between the electrodes. The method can be easily adapted to geometries with multiple cover layers. As an example, the sensitivity of the capacitance to changes in the permittivity for alternate wiring schemes of electrodes is discussed.
Original languageEnglish
Title of host publication2011 IEEE Sensors Proceedings
Place of Publication445 Hoes Lane Piscataway, NJ 08855-1331 USA
PublisherIEEE
Pages1970-1973
Number of pages4
ISBN (Print)978-1-4244-9288-6
DOIs
Publication statusPublished - 2011

Publication series

NameProceedings of IEEE Sensors

Fields of science

  • 203017 Micromechanics
  • 202019 High frequency engineering
  • 202028 Microelectronics
  • 202039 Theoretical electrical engineering
  • 202037 Signal processing
  • 202027 Mechatronics
  • 202036 Sensor systems

JKU Focus areas

  • Mechatronics and Information Processing

Cite this