TY - JOUR
T1 - Amorphous Pockets in Si:Comparison of Coupled Molecular Dynamics and TEM Image Contrast Simulations with Experimental Results
AU - Otto, G.
AU - Pongratz, P.
AU - Palmetshofer, Leopold
AU - Hobler, G.
PY - 2007/2
Y1 - 2007/2
UR - https://www.scopus.com/pages/publications/33847004019
U2 - 10.1016/j.nimb.2006.11.020
DO - 10.1016/j.nimb.2006.11.020
M3 - Article
SN - 1872-9584
VL - 255
SP - 105
EP - 109
JO - Nuclear Instruments and Methods in Physics Research Section B
JF - Nuclear Instruments and Methods in Physics Research Section B
IS - 1 SPEC. ISS.
ER -