Aluminium, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic gratings

Jasmin Spettel; Gerald Stocker; Thang Duy Dao; Reyhaneh Jannesari; Andreas Tortschanoff; Parviz Saeidi; Gerald Pühringer; Florian Dubois; Clement Fleury; Cristina Consani; Thomas Grille; Elmar Aschauer; Mohssen Moridi; Bernhard Jakoby

Aluminium, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic gratings

Jasmin Spettel
, Gerald Stocker
, Thang Duy Dao
, Reyhaneh Jannesari
, Andreas Tortschanoff
, Parviz Saeidi
, Gerald Pühringer
, Florian Dubois
, Clement Fleury
, Cristina Consani
, Thomas Grille
, Elmar Aschauer
, Mohssen Moridi
, Bernhard Jakoby

Institute of Microelectronics and Microsensors

Research output: Contribution to journal › Article › peer-review

Abstract

We numerically and experimentally investigate aluminum metal (Al), gold-tin (AuSn) and titanium-tungsten (TiW) metallic alloys as plasmonic materials in the mid-infrared (MIR) region using spectroscopic ellipsometry and reflection measurements of gratings. The angle dependence of the specular reflectance of shallow gratings is investigated using a free-beam measurement setup and compared to simulations. It is shown that the deep and narrow resonances observed for all three materials match the associated prediction from simulations.

Original language	English
Pages (from-to)	1058-1069
Number of pages	12
Journal	Optical Materials Express
Volume	11
Issue number	4
Publication status	Published - 2021

Fields of science

202019 High frequency engineering
202021 Industrial electronics
202036 Sensor systems
203017 Micromechanics
202 Electrical Engineering, Electronics, Information Engineering
202027 Mechatronics
202028 Microelectronics
202037 Signal processing
502058 Digital transformation

JKU Focus areas

Digital Transformation

Cite this

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title = "Aluminium, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic gratings",

abstract = "We numerically and experimentally investigate aluminum metal (Al), gold-tin (AuSn) and titanium-tungsten (TiW) metallic alloys as plasmonic materials in the mid-infrared (MIR) region using spectroscopic ellipsometry and reflection measurements of gratings. The angle dependence of the specular reflectance of shallow gratings is investigated using a free-beam measurement setup and compared to simulations. It is shown that the deep and narrow resonances observed for all three materials match the associated prediction from simulations.",

author = "Jasmin Spettel and Gerald Stocker and Dao, \{Thang Duy\} and Reyhaneh Jannesari and Andreas Tortschanoff and Parviz Saeidi and Gerald P{\"u}hringer and Florian Dubois and Clement Fleury and Cristina Consani and Thomas Grille and Elmar Aschauer and Mohssen Moridi and Bernhard Jakoby",

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language = "English",

volume = "11",

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journal = "Optical Materials Express",

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TY - JOUR

T1 - Aluminium, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic gratings

AU - Spettel, Jasmin

AU - Stocker, Gerald

AU - Dao, Thang Duy

AU - Jannesari, Reyhaneh

AU - Tortschanoff, Andreas

AU - Saeidi, Parviz

AU - Pühringer, Gerald

AU - Dubois, Florian

AU - Fleury, Clement

AU - Consani, Cristina

AU - Grille, Thomas

AU - Aschauer, Elmar

AU - Moridi, Mohssen

AU - Jakoby, Bernhard

PY - 2021

Y1 - 2021

N2 - We numerically and experimentally investigate aluminum metal (Al), gold-tin (AuSn) and titanium-tungsten (TiW) metallic alloys as plasmonic materials in the mid-infrared (MIR) region using spectroscopic ellipsometry and reflection measurements of gratings. The angle dependence of the specular reflectance of shallow gratings is investigated using a free-beam measurement setup and compared to simulations. It is shown that the deep and narrow resonances observed for all three materials match the associated prediction from simulations.

AB - We numerically and experimentally investigate aluminum metal (Al), gold-tin (AuSn) and titanium-tungsten (TiW) metallic alloys as plasmonic materials in the mid-infrared (MIR) region using spectroscopic ellipsometry and reflection measurements of gratings. The angle dependence of the specular reflectance of shallow gratings is investigated using a free-beam measurement setup and compared to simulations. It is shown that the deep and narrow resonances observed for all three materials match the associated prediction from simulations.

UR - https://www.scopus.com/pages/publications/85103335518

M3 - Article

SN - 2159-3930

VL - 11

SP - 1058

EP - 1069

JO - Optical Materials Express

JF - Optical Materials Express

IS - 4

ER -

Aluminium, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic gratings

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Aluminium, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic gratings

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