A Study of Kinetic Rate Equation Model for Simulations of MBE Crystal Growth: The Temperature Dependence of Surface Kinetic Processes

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1247–1257
Number of pages	11
Journal	Semiconductor Science and Technology
Volume	13
Issue number	11
DOIs	https://doi.org/10.1088/0268-1242/13/11/003
Publication status	Published - 1995

Fields of science

@article{3f49d8a7cc0c4579955726bb82ef02c6,

title = "A Study of Kinetic Rate Equation Model for Simulations of MBE Crystal Growth: The Temperature Dependence of Surface Kinetic Processes",

author = "Dana Papajova and Helmut Sitter",

year = "1995",

doi = "10.1088/0268-1242/13/11/003",

language = "English",

volume = "13",

pages = "1247–1257",

journal = "Semiconductor Science and Technology",

publisher = "IOP Publishing",

number = "11",

}

TY - JOUR

T1 - A Study of Kinetic Rate Equation Model for Simulations of MBE Crystal Growth: The Temperature Dependence of Surface Kinetic Processes

AU - Papajova, Dana

AU - Sitter, Helmut

PY - 1995

Y1 - 1995

U2 - 10.1088/0268-1242/13/11/003

DO - 10.1088/0268-1242/13/11/003

M3 - Article

VL - 13

SP - 1247

EP - 1257

JO - Semiconductor Science and Technology

JF - Semiconductor Science and Technology

IS - 11

ER -