A Novel Micromachined Liquid Property Sensor Utilizing a Doubly Clamped Vibrating Beam

Erwin Reichel; Bernhard Weiß; Christian Riesch; Artur Jachimowicz; Bernhard Jakoby

A Novel Micromachined Liquid Property Sensor Utilizing a Doubly Clamped Vibrating Beam

Erwin Reichel
, Bernhard Weiß
, Christian Riesch
, Artur Jachimowicz
, Bernhard Jakoby

Institute of Microelectronics and Microsensors

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Abstract

A novel miniaturized sensor for the online measurement of the mechanical properties of a viscous liquid utilizing a resonating beam has been designed and fabricated in silicon technology. The modeling of the electromagnetic actuation of the device is discussed and the response of a first prototype was experimentally characterized using impedance spectroscopy.

Original language	English
Title of host publication	Eurosensors XX Proceedings 2006
Editors	Eurosensors
Pages	M2B-P32
Number of pages	4
Volume	1
Publication status	Published - Sept 2006

Fields of science

202 Electrical Engineering, Electronics, Information Engineering
202019 High frequency engineering
202021 Industrial electronics
202027 Mechatronics
202028 Microelectronics
202036 Sensor systems
202037 Signal processing
203017 Micromechanics
502058 Digital transformation

Cite this

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title = "A Novel Micromachined Liquid Property Sensor Utilizing a Doubly Clamped Vibrating Beam",

abstract = "A novel miniaturized sensor for the online measurement of the mechanical properties of a viscous liquid utilizing a resonating beam has been designed and fabricated in silicon technology. The modeling of the electromagnetic actuation of the device is discussed and the response of a first prototype was experimentally characterized using impedance spectroscopy.",

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AU - Reichel, Erwin

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AU - Jakoby, Bernhard

PY - 2006/9

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AB - A novel miniaturized sensor for the online measurement of the mechanical properties of a viscous liquid utilizing a resonating beam has been designed and fabricated in silicon technology. The modeling of the electromagnetic actuation of the device is discussed and the response of a first prototype was experimentally characterized using impedance spectroscopy.

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BT - Eurosensors XX Proceedings 2006

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