@article{0ecedb1b0bf344568ccaeac97d5ec384,
title = "A Moir{\'e} method for high accuracy alignment in nanoimprint lithography",
author = "Iris Bergmair and W. Schwinger and M. Gmainer and Rainer Sch{\"o}ftner and Thomas Glinsner and Michael M{\"u}hlberger and Kurt Hingerl and M. Vogler and H Schmidt and E.-B. Kley and Christine Hasenfu{\ss}",
year = "2007",
doi = "10.1016/j.mee.2007.01.081",
language = "English",
volume = "84",
pages = "925--927",
journal = "Microelectronic Engineering",
issn = "1873-5568",
publisher = "ELSEVIER SCIENCE BV",
}