A micromachined wet cell for a Love-wave liquid sensor

Scott D. Curtin; Bernhard Jakoby; Axel Berthold; Vijay K. Varadan; Vasundara V. Varadan; Michael J. Vellekoop

doi:10.1117/12.320170

A micromachined wet cell for a Love-wave liquid sensor

Scott D. Curtin
, Bernhard Jakoby
, Axel Berthold
, Vijay K. Varadan
, Vasundara V. Varadan
, Michael J. Vellekoop

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	194-200
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3328
DOIs	https://doi.org/10.1117/12.320170
Publication status	Published - 1998
Externally published	Yes
Event	Smart Structures and Materials 1998: Smart Electronics and MEMS - San Diego, CA, United States Duration: 02 Mar 1998 → 02 Mar 1998

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Fields of science

202 Electrical Engineering, Electronics, Information Engineering

Access to Document

10.1117/12.320170

Cite this

@article{2f423762b17a455e98c72521f4856a1d,

title = "A micromachined wet cell for a Love-wave liquid sensor",

keywords = "Liquid sensor, Love-wave sensor, MEMS, Micro channel, SAW, Silicon micromachining, Wet cell",

author = "Curtin, \{Scott D.\} and Bernhard Jakoby and Axel Berthold and Varadan, \{Vijay K.\} and Varadan, \{Vasundara V.\} and Vellekoop, \{Michael J.\}",

year = "1998",

doi = "10.1117/12.320170",

language = "English",

volume = "3328",

pages = "194--200",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "Smart Structures and Materials 1998: Smart Electronics and MEMS ; Conference date: 02-03-1998 Through 02-03-1998",

}

TY - JOUR

T1 - A micromachined wet cell for a Love-wave liquid sensor

AU - Curtin, Scott D.

AU - Jakoby, Bernhard

AU - Berthold, Axel

AU - Varadan, Vijay K.

AU - Varadan, Vasundara V.

AU - Vellekoop, Michael J.

PY - 1998

Y1 - 1998

KW - Liquid sensor

KW - Love-wave sensor

KW - MEMS

KW - Micro channel

KW - SAW

KW - Silicon micromachining

KW - Wet cell

UR - https://www.scopus.com/pages/publications/0343788550

U2 - 10.1117/12.320170

DO - 10.1117/12.320170

M3 - Conference article

AN - SCOPUS:0343788550

SN - 0277-786X

VL - 3328

SP - 194

EP - 200

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Smart Structures and Materials 1998: Smart Electronics and MEMS

Y2 - 2 March 1998 through 2 March 1998

ER -

A micromachined wet cell for a Love-wave liquid sensor

UN SDGs

Fields of science

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Cite this