A micromachined suspended plate viscosity sensor featuring in-plane vibrations and integrated piezoresistive readout

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Fields of science

@inproceedings{eada59a1df7942ddb316bf155da115dd,

title = "A micromachined suspended plate viscosity sensor featuring in-plane vibrations and integrated piezoresistive readout",

author = "Christian Riesch and Erwin Reichel and Artur Jachimowicz and Johannes Schalko and Bernhard Jakoby and Franz Keplinger",

year = "2009",

month = jun,

language = "English",

pages = "11781181",

booktitle = "Proceedings Transducers 2009",

}

TY - GEN

T1 - A micromachined suspended plate viscosity sensor featuring in-plane vibrations and integrated piezoresistive readout

AU - Riesch, Christian

AU - Reichel, Erwin

AU - Jachimowicz, Artur

AU - Schalko, Johannes

AU - Jakoby, Bernhard

AU - Keplinger, Franz

PY - 2009/6

Y1 - 2009/6

M3 - Conference proceedings

SP - 11781181

BT - Proceedings Transducers 2009

ER -