A Laser Micromachining Projection Microscope

K. Osvay; Z. Bor; B. Racz; Johannes Heitz; I.N. Ross

doi:10.1117/12.2308737

A Laser Micromachining Projection Microscope

K. Osvay
, Z. Bor
, B. Racz
, Johannes Heitz
, I.N. Ross

Institute of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	16th Congress of the International Commission for Optics: Optics as a Key to High Technology
Editors	Gy Akos, T. Lippenyi, G. Lupkovics, A. Podmaniczky
Pages	751-752
Number of pages	2
Volume	1983
DOIs	https://doi.org/10.1117/12.2308737
Publication status	Published - 1993

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Number	pt 2
Volume	1983
ISSN (Print)	0277-786X

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Fields of science

103016 Laser physics
103020 Surface physics
103 Physics, Astronomy
103008 Experimental physics
103021 Optics
103023 Polymer physics

JKU Focus areas

Engineering and Natural Sciences (in general)

Access to Document

10.1117/12.2308737

Cite this

Osvay, K., Bor, Z., Racz, B., Heitz, J., & Ross, I. N. (1993). A Laser Micromachining Projection Microscope. In G. Akos, T. Lippenyi, G. Lupkovics, & A. Podmaniczky (Eds.), 16th Congress of the International Commission for Optics: Optics as a Key to High Technology (Vol. 1983, pp. 751-752). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 1983, No. pt 2). https://doi.org/10.1117/12.2308737

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title = "A Laser Micromachining Projection Microscope",

author = "K. Osvay and Z. Bor and B. Racz and Johannes Heitz and I.N. Ross",

year = "1993",

doi = "10.1117/12.2308737",

language = "English",

isbn = "0819412309",

volume = "1983",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

number = "pt 2",

pages = "751--752",

editor = "Gy Akos and T. Lippenyi and G. Lupkovics and A. Podmaniczky",

booktitle = "16th Congress of the International Commission for Optics: Optics as a Key to High Technology",

}

Osvay, K, Bor, Z, Racz, B, Heitz, J & Ross, IN 1993, A Laser Micromachining Projection Microscope. in G Akos, T Lippenyi, G Lupkovics & A Podmaniczky (eds), 16th Congress of the International Commission for Optics: Optics as a Key to High Technology. vol. 1983, Proceedings of SPIE - The International Society for Optical Engineering, no. pt 2, vol. 1983, pp. 751-752. https://doi.org/10.1117/12.2308737

A Laser Micromachining Projection Microscope. / Osvay, K.; Bor, Z.; Racz, B. et al.
16th Congress of the International Commission for Optics: Optics as a Key to High Technology. ed. / Gy Akos; T. Lippenyi; G. Lupkovics; A. Podmaniczky. Vol. 1983 1993. p. 751-752 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 1983, No. pt 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

TY - GEN

T1 - A Laser Micromachining Projection Microscope

AU - Osvay, K.

AU - Bor, Z.

AU - Racz, B.

AU - Heitz, Johannes

AU - Ross, I.N.

PY - 1993

Y1 - 1993

UR - https://www.scopus.com/pages/publications/0027866034

U2 - 10.1117/12.2308737

DO - 10.1117/12.2308737

M3 - Conference proceedings

SN - 0819412309

VL - 1983

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 751

EP - 752

BT - 16th Congress of the International Commission for Optics: Optics as a Key to High Technology

A2 - Akos, Gy

A2 - Lippenyi, T.

A2 - Lupkovics, G.

A2 - Podmaniczky, A.

ER -

Osvay K, Bor Z, Racz B, Heitz J, Ross IN. A Laser Micromachining Projection Microscope. In Akos G, Lippenyi T, Lupkovics G, Podmaniczky A, editors, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology. Vol. 1983. 1993. p. 751-752. (Proceedings of SPIE - The International Society for Optical Engineering; pt 2). doi: 10.1117/12.2308737

A Laser Micromachining Projection Microscope

Publication series

UN SDGs

Fields of science

JKU Focus areas

Access to Document

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Cite this