A Full-wave Model of a Piezo-electric Fluid Sensor Using Lateral Field Excitation

Thomas Voglhuber-Brunnmaier; Bernhard Jakoby

A Full-wave Model of a Piezo-electric Fluid Sensor Using Lateral Field Excitation

Institute of Microelectronics and Microsensors

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Abstract

In the presented work a piezoelectric fluid sensor featuring both electrodes on one face of the piezoelectric disc (LFE electrode arrangement) is efficiently modeled as a layered structure in the spectral domain. The interaction of piezoelectric disc and sample liquid, which is not fully manageable in an analytical way or too comprehensive for FEM, is modeled in a full--wave fashion by the method. In this contribution, the modeling approach is demonstrated and the mass loading effect of the electrodes is accounted for by a perturbation method. Furthermore the electric field distribution within the sensor is illustrated.

Original language	English
Title of host publication	Proceedings IEEE International Ultrasonics Symposium (IUS)
Number of pages	4
Publication status	Published - Oct 2010

Fields of science

203017 Micromechanics
202019 High frequency engineering
202028 Microelectronics
202039 Theoretical electrical engineering
202037 Signal processing
202027 Mechatronics
202036 Sensor systems

JKU Focus areas

Mechatronics and Information Processing

Cite this

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title = "A Full-wave Model of a Piezo-electric Fluid Sensor Using Lateral Field Excitation",

abstract = "In the presented work a piezoelectric fluid sensor featuring both electrodes on one face of the piezoelectric disc (LFE electrode arrangement) is efficiently modeled as a layered structure in the spectral domain. The interaction of piezoelectric disc and sample liquid, which is not fully manageable in an analytical way or too comprehensive for FEM, is modeled in a full--wave fashion by the method. In this contribution, the modeling approach is demonstrated and the mass loading effect of the electrodes is accounted for by a perturbation method. Furthermore the electric field distribution within the sensor is illustrated.",

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N2 - In the presented work a piezoelectric fluid sensor featuring both electrodes on one face of the piezoelectric disc (LFE electrode arrangement) is efficiently modeled as a layered structure in the spectral domain. The interaction of piezoelectric disc and sample liquid, which is not fully manageable in an analytical way or too comprehensive for FEM, is modeled in a full--wave fashion by the method. In this contribution, the modeling approach is demonstrated and the mass loading effect of the electrodes is accounted for by a perturbation method. Furthermore the electric field distribution within the sensor is illustrated.

AB - In the presented work a piezoelectric fluid sensor featuring both electrodes on one face of the piezoelectric disc (LFE electrode arrangement) is efficiently modeled as a layered structure in the spectral domain. The interaction of piezoelectric disc and sample liquid, which is not fully manageable in an analytical way or too comprehensive for FEM, is modeled in a full--wave fashion by the method. In this contribution, the modeling approach is demonstrated and the mass loading effect of the electrodes is accounted for by a perturbation method. Furthermore the electric field distribution within the sensor is illustrated.

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