A comparison of experimental resolution for critical thickness determination by UHV-STM, x-ray diffraction and in situ RHEED

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Semiconductor Heteroepitaxy: Growth, Characterization and Device Applications
Publication status	Published - 1995

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@article{1e64060403e64102ae196f66c3f1174a,

title = "A comparison of experimental resolution for critical thickness determination by UHV-STM, x-ray diffraction and in situ RHEED",

author = "G{\"u}nther Bauer and C. Pichler and Gunther Springholz",

year = "1995",

language = "English",

journal = "Semiconductor Heteroepitaxy: Growth, Characterization and Device Applications",

}

TY - JOUR

T1 - A comparison of experimental resolution for critical thickness determination by UHV-STM, x-ray diffraction and in situ RHEED

AU - Bauer, Günther

AU - Pichler, C.

AU - Springholz, Gunther

PY - 1995

Y1 - 1995

M3 - Article

JO - Semiconductor Heteroepitaxy: Growth, Characterization and Device Applications

JF - Semiconductor Heteroepitaxy: Growth, Characterization and Device Applications

ER -