A CMOS Compatible Pyroelectric Mid-Infrared Detector Based on Aluminium Nitride

Christian Ranacher; Cristina Consani; Andreas Tortschanoff; Lukas Rauter; Dominik Holzmann; Clement Fleury; Gerald Stocker; Andrea Fant; Herbert Schaunig; Peter Irsigler; Thomas Grille; Bernhard Jakoby

A CMOS Compatible Pyroelectric Mid-Infrared Detector Based on Aluminium Nitride

Christian Ranacher, Cristina Consani, Andreas Tortschanoff, Lukas Rauter, Dominik Holzmann, Clement Fleury, Gerald Stocker, Andrea Fant, Herbert Schaunig, Peter Irsigler, Thomas Grille, Bernhard Jakoby

Institute of Microelectronics and Microsensors

Research output: Contribution to journal › Article › peer-review

Abstract

The detection of infrared radiation is of great interest for a wide range of applications, such as absorption sensing in the infrared spectral range. In this work, we present a CMOS compatible pyroelectric detector which was devised as a mid-infrared detector, comprising aluminium nitride (AlN) as the pyroelectric material and fabricated using semiconductor mass fabrication processes. To ensure thermal decoupling of the detector, the detectors are realized on a Si3N4/SiO2 membrane. The detectors have been tested at a wavelength close to the CO2 absorption region in the mid-infrared. Devices with various detector and membrane sizes were fabricated and the influence of these dimensions on the performance was investigated. The noise equivalent power of the first demonstrator devices connected to a readout circuit was measured to be as low as 5.3 × 10 − 9 W / Hz .

Original language	English
Article number	2513
Number of pages	10
Journal	Sensors
Volume	19
Issue number	11
Publication status	Published - 01 Jun 2019

Fields of science

202036 Sensor systems
203017 Micromechanics
202 Electrical Engineering, Electronics, Information Engineering
202027 Mechatronics
202028 Microelectronics

JKU Focus areas

Digital Transformation

Cite this

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title = "A CMOS Compatible Pyroelectric Mid-Infrared Detector Based on Aluminium Nitride",

abstract = "The detection of infrared radiation is of great interest for a wide range of applications, such as absorption sensing in the infrared spectral range. In this work, we present a CMOS compatible pyroelectric detector which was devised as a mid-infrared detector, comprising aluminium nitride (AlN) as the pyroelectric material and fabricated using semiconductor mass fabrication processes. To ensure thermal decoupling of the detector, the detectors are realized on a Si3N4/SiO2 membrane. The detectors have been tested at a wavelength close to the CO2 absorption region in the mid-infrared. Devices with various detector and membrane sizes were fabricated and the influence of these dimensions on the performance was investigated. The noise equivalent power of the first demonstrator devices connected to a readout circuit was measured to be as low as 5.3 × 10 − 9 W / Hz .",

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AU - Ranacher, Christian

AU - Consani, Cristina

AU - Tortschanoff, Andreas

AU - Rauter, Lukas

AU - Holzmann, Dominik

AU - Fleury, Clement

AU - Stocker, Gerald

AU - Fant, Andrea

AU - Schaunig, Herbert

AU - Irsigler, Peter

AU - Grille, Thomas

AU - Jakoby, Bernhard

PY - 2019/6/1

Y1 - 2019/6/1

N2 - The detection of infrared radiation is of great interest for a wide range of applications, such as absorption sensing in the infrared spectral range. In this work, we present a CMOS compatible pyroelectric detector which was devised as a mid-infrared detector, comprising aluminium nitride (AlN) as the pyroelectric material and fabricated using semiconductor mass fabrication processes. To ensure thermal decoupling of the detector, the detectors are realized on a Si3N4/SiO2 membrane. The detectors have been tested at a wavelength close to the CO2 absorption region in the mid-infrared. Devices with various detector and membrane sizes were fabricated and the influence of these dimensions on the performance was investigated. The noise equivalent power of the first demonstrator devices connected to a readout circuit was measured to be as low as 5.3 × 10 − 9 W / Hz .

AB - The detection of infrared radiation is of great interest for a wide range of applications, such as absorption sensing in the infrared spectral range. In this work, we present a CMOS compatible pyroelectric detector which was devised as a mid-infrared detector, comprising aluminium nitride (AlN) as the pyroelectric material and fabricated using semiconductor mass fabrication processes. To ensure thermal decoupling of the detector, the detectors are realized on a Si3N4/SiO2 membrane. The detectors have been tested at a wavelength close to the CO2 absorption region in the mid-infrared. Devices with various detector and membrane sizes were fabricated and the influence of these dimensions on the performance was investigated. The noise equivalent power of the first demonstrator devices connected to a readout circuit was measured to be as low as 5.3 × 10 − 9 W / Hz .

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A CMOS Compatible Pyroelectric Mid-Infrared Detector Based on Aluminium Nitride

Abstract

Fields of science

JKU Focus areas

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