| Original language | German (Austria) |
|---|---|
| Publication status | Published - Feb 2001 |
Fields of science
- 103016 Laser physics
- 210005 Nanophotonics
Ätzen von kristallinem Si in Cl2-Atmosphäre im optischen Nahfeld einer Quarzfaserspitze
Thomas Brandstetter
Research output: Thesis › Master's / Diploma thesis