UV nanoimprint lithography for ordering SiGe quantum dots over large areas

  • Elisabeth Lausecker (Speaker)

Activity: Talk or presentationContributed talkunknown

Period27 Oct 2011
Event title9th Workshop “Beams & More“, Institut für Mikroelektronik Stuttgart, 27.10.2011
Event typeConference
LocationGermanyShow on map

Fields of science

  • 103009 Solid state physics
  • 103 Physics, Astronomy
  • 103011 Semiconductor physics
  • 210006 Nanotechnology
  • 103026 Quantum optics
  • 202018 Semiconductor electronics

JKU Focus areas

  • Nano-, Bio- and Polymer-Systems: From Structure to Function