UV nanoimprint lithography and mold replication for the site-controlled self-assembly of Si/Ge islands

  • Elisabeth Lausecker (Speaker)
  • Brehm, M. (Speaker)
  • Martyna Justyna Grydlik (Speaker)
  • Iris Bergmair (Speaker)
  • Michael Mühlberger (Speaker)

Activity: Talk or presentation › Contributed talk › unknown

Period03 Jun 2010
Event titleInternational Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication
Event typeConference
LocationUnited StatesShow on map

Fields of science

  • 103009 Solid state physics
  • 103018 Materials physics
  • 103020 Surface physics
  • 103 Physics, Astronomy
  • 103040 Photonics
  • 202032 Photovoltaics
  • 103011 Semiconductor physics
  • 210006 Nanotechnology
  • 103021 Optics
  • 103017 Magnetism

JKU Focus areas

  • Nano-, Bio- and Polymer-Systems: From Structure to Function