Uncertainties of a Linear Variable Differential Inductor Probe for Picometer Resolution Measurement Systems

  • Bernhard Aschenbrenner (Speaker)
  • Zagar, B. (Speaker)

Activity: Talk or presentation › Contributed talk › unknown

Description

Linear Variable Differential Inductor (LVDI) probes are used for most precise roundness and roughness measurements down to sub–nanometer. Even under rough conditions the LVDI guarantees a good repeatability of the measurement. In this paper some widely overlooked sources of errors that–if unavoidable–increase measurement uncertainty beyond the theoretical limit attainable are discussed and the magnitude of their influence is detailed. Usually safely ignored influences like stochastic noise, heating and elastic deformation can result in uncertainties of several nanometers.
Period08 Jun 2011
Event titleSensor + Test 2011
Event typeConference
LocationGermanyShow on map

Fields of science

  • 202037 Signal processing
  • 202012 Electrical measurement technology
  • 203016 Measurement engineering

JKU Focus areas

  • Mechatronics and Information Processing

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