Oxide-free SiC-SiC Direct Wafer Bonding and its Characterization

  • Peter Kerepesi (Speaker)

Activity: Talk or presentationContributed talkscience-to-science

Period08 Oct 2023
Event title244th ECS Meeting, Gothenburg, Sweden, 8.-12. Oct. 2023
Event typeConference
LocationSwedenShow on map

Fields of science

  • 103 Physics, Astronomy
  • 210 Nanotechnology