Impact of Plasma Treatment on Silicon Wafers for Direct Wafer Bonding

  • Nikolaus Rauch (Speaker)

Activity: Talk or presentation › Poster presentation › science-to-science

Period08 Sept 2021
Event title11th Workshop Ellipsometry
Event typeConference
LocationAustriaShow on map

Fields of science

  • 103020 Surface physics
  • 103 Physics, Astronomy
  • 210006 Nanotechnology
  • 103021 Optics

JKU Focus areas

  • Sustainable Development: Responsible Technologies and Management

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