Energy Shaping Control of Electrostatic Membrane Vibrations

Description

A strong analytical mathematical formulation of electrostatic transducers is the necessary prerequisite for the design of feedback controllers. Based on the theory of Hamiltonian systems the mathematical model of a typical electrostatic transducer configuration with a moving membrane electrode and a rigid backplate electrode is derived. It is a well known fact that an increase in the sensivity of the transducer often brings about also an increase in the nonlinear distortion and may occur a sticking of the membrane to the backplate electrode. In this paper, we propose a concept that gives a possible solution for these undesirable effects by using a controlled voltage source for the supply voltage of the transducer. The controller is designed by shaping the potential energy of the closed loop system. The change of the capacity of the transducer due to the motion of the membrance is considered as the sensor output.

Period	12 Sept 1999
Event title	1999 ASME Engineering Technical Conferences
Event type	Conference
Location	United StatesShow on map