Anisotropic remastering of UV-NIL replica molds for feature size reduction for feature size reduction

  • Elisabeth Lausecker (Speaker)

Activity: Talk or presentation › Poster presentation › unknown

Period25 Oct 2012
Event title11th International Conference on Nanoimprint and Nanoprint Technology
Event typeConference
LocationUnited StatesShow on map

Fields of science

  • 103009 Solid state physics
  • 103 Physics, Astronomy
  • 103011 Semiconductor physics
  • 210006 Nanotechnology
  • 103026 Quantum optics
  • 202018 Semiconductor electronics

JKU Focus areas

  • Nano-, Bio- and Polymer-Systems: From Structure to Function