Anisotropic re-mastering for reducing feature sizes on UV-NIL replica stamps

  • Elisabeth Lausecker (Speaker)

Activity: Talk or presentation › Contributed talk › unknown

Period20 Sept 2011
Event title37th International Conference on Micro and Nano Engineering (MNE 2011), Sep 19-23, 2011, Berlin,D
Event typeConference
LocationGermanyShow on map

Fields of science

  • 103009 Solid state physics
  • 103 Physics, Astronomy
  • 103011 Semiconductor physics
  • 210006 Nanotechnology
  • 103026 Quantum optics
  • 202018 Semiconductor electronics

JKU Focus areas

  • Nano-, Bio- and Polymer-Systems: From Structure to Function

Documents & Links