An efficient modeling approach for the capacitance of interdigitating electrodes

Description

Interdigitating electrodes present a feasible method to realize capacitive sensing structrues. Finding an analytical expression for the capacitance of a multi-layered geometry, however, proves difficult. We present a semi-numerical method based on the modelling of the charge distribution on the electrodes in order to obtain an approximation for the capacitance. The method is then applied to analyze the sensitivity of different wiring schemes, when the capacitance is used to detect changes in permittivity of different material layers.

Period	24 Apr 2012
Event title	Informationstagung Mikroelektronik 12
Event type	Conference
Location	AustriaShow on map