12.5 nm Half Pitch NanoimprintLithography Using Stamps Replicated From CHARPAN Master Templates

  • D. Treiblmayr (Speaker)
  • M. Kast (Speaker)
  • G. Kreindl (Speaker)
  • Thomas Glinsner (Speaker)
  • Elmar Platzgummer (Speaker)
  • Hans Loeschner (Speaker)
  • P. Joechl (Speaker)
  • S. Eder-Kapl (Speaker)
  • T. Narzt (Speaker)
  • Michael Mühlberger (Speaker)
  • Martin Böhm (Speaker)
  • Iris Bergmair (Speaker)
  • M. Chouiki (Speaker)
  • Rainer Schöftner (Speaker)
  • Elisabeth Lausecker (Speaker)
  • Fromherz, T. (Speaker)

Activity: Talk or presentation › Poster presentation › unknown

Period12 Oct 2010
Event title9th International Conference on Nanoimprint and Nanoprint Technology
Event typeConference
LocationDenmarkShow on map

Fields of science

  • 103009 Solid state physics
  • 103018 Materials physics
  • 103020 Surface physics
  • 103 Physics, Astronomy
  • 103040 Photonics
  • 202032 Photovoltaics
  • 103011 Semiconductor physics
  • 210006 Nanotechnology
  • 103021 Optics
  • 103017 Magnetism

JKU Focus areas

  • Nano-, Bio- and Polymer-Systems: From Structure to Function