Tunable resonators in the low kHz range for viscosity sensing

Martin Heinisch; Erwin Reichel; Isabelle Dufour; Bernhard Jakoby

doi:10.1016/j.sna.2012.03.009

Tunable resonators in the low kHz range for viscosity sensing

Martin Heinisch
, Erwin Reichel
, Isabelle Dufour
, Bernhard Jakoby

Institut für Mikroelektronik und Mikrosensorik

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Abstract

This contribution gives an overview of the design and development of miniaturized, tunable resonating viscosity sensors in the low kHz range incorporating first modeling approaches as well as experimental results. The effect of different designs, potential improvements in the setups as well as the effect of cross sensitivities are discussed and outlined.

Originalsprache	Englisch
Seiten (von - bis)	111-117
Seitenumfang	7
Fachzeitschrift	Sensors and Actuators A: Physical
Volume	186
DOIs	https://doi.org/10.1016/j.sna.2012.03.009
Publikationsstatus	Veröffentlicht - Okt. 2012

Wissenschaftszweige

203017 Mikromechanik
202019 Hochfrequenztechnik
202028 Mikroelektronik
202039 Theoretische Elektrotechnik
202037 Signalverarbeitung
202027 Mechatronik
202036 Sensorik

JKU-Schwerpunkte

Mechatronics and Information Processing

Zugriff auf Dokument

10.1016/j.sna.2012.03.009

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Verknüpfung zur Publikation in Scopus

Dieses zitieren

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