@article{80ca3edf6a854d679cb13a1d0f57c185,
title = "Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films",
author = "Pedarnig, \{Johannes David\} and K. Siraj and Marius-Aurel Bodea and I. Puica and Wolfgang Lang and Renata Kolarova and Peter Bauer and Klaus Haselgr{\"u}bler and Christine Hasenfuss and I. Beinik and Christian Teichert",
year = "2010",
month = sep,
day = "30",
doi = "10.1016/j.tsf.2010.07.021",
language = "English",
volume = "518",
pages = "7075--7080",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "23",
}