Stress in Evaporated and Sputtered Thin Films - A Comparison

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	Englisch
Seiten (von - bis)	1973-1982
Seitenumfang	10
Fachzeitschrift	Surface and Coatings Technology
Volume	204
Ausgabenummer	12-13
DOIs	https://doi.org/10.1016/j.surfcoat.2009.09.047
Publikationsstatus	Veröffentlicht - 15 März 2010

Wissenschaftszweige

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title = "Stress in Evaporated and Sputtered Thin Films - A Comparison",

author = "Reinhold Koch",

year = "2010",

month = mar,

day = "15",

doi = "10.1016/j.surfcoat.2009.09.047",

language = "English",

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pages = "1973--1982",

journal = "Surface and Coatings Technology",

issn = "1879-3347",

number = "12-13",

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TY - JOUR

T1 - Stress in Evaporated and Sputtered Thin Films - A Comparison

AU - Koch, Reinhold

PY - 2010/3/15

Y1 - 2010/3/15

UR - https://www.scopus.com/pages/publications/76349122013

U2 - 10.1016/j.surfcoat.2009.09.047

DO - 10.1016/j.surfcoat.2009.09.047

M3 - Article

SN - 1879-3347

VL - 204

SP - 1973

EP - 1982

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 12-13

ER -