TY - GEN
T1 - Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensors
AU - Lucklum, Frieder
AU - Jakoby, Bernhard
AU - Hauptmann, Peter
AU - de Rooij, Nico F.
PY - 2006
Y1 - 2006
N2 - The excitation of acoustic resonators is traditionally based on the piezoelectric effect. The alternative magnetic direct generation of acoustic waves is the basic operation principle of electromagnetic acoustic transducers (EMATs). For sensor applications this method can be applied to a mechanical resonator, thus enhancing the rather poor transduction efficiency by the high acoustic Q-factors. This principle has been theoretically investigated in FEM and PSpice simulations and practically applied to high-Q silicon membranes. The advantages of this non-piezoelectric sensor showing strong resonances with Q-factors up to 10^5 have been demonstrated. Sensor response to mass loading shows a Sauerbrey-like behavior suitable for sensing purposes.
AB - The excitation of acoustic resonators is traditionally based on the piezoelectric effect. The alternative magnetic direct generation of acoustic waves is the basic operation principle of electromagnetic acoustic transducers (EMATs). For sensor applications this method can be applied to a mechanical resonator, thus enhancing the rather poor transduction efficiency by the high acoustic Q-factors. This principle has been theoretically investigated in FEM and PSpice simulations and practically applied to high-Q silicon membranes. The advantages of this non-piezoelectric sensor showing strong resonances with Q-factors up to 10^5 have been demonstrated. Sensor response to mass loading shows a Sauerbrey-like behavior suitable for sensing purposes.
UR - http://ieeexplore.ieee.org/xpls/abs_all.jsp?tp=&arnumber=4053744&isnumber=4053697
UR - https://www.scopus.com/pages/publications/39049165272
U2 - 10.1109/FREQ.2006.275366
DO - 10.1109/FREQ.2006.275366
M3 - Conference proceedings
SN - 1424400740
SN - 9781424400744
T3 - Proceedings of the IEEE International Frequency Control Symposium and Exposition
SP - 139
EP - 144
BT - Proceedings of the 2006 IEEE International Frequency Control Symposium and Exposition, Miami, June 2006
A2 - IEEE, null
ER -