Reaction Kinetics and Simulation of Growth in Pyrolytic Laser-Induced Chemical Vapor Deposition

Publikation: Beitrag in Buch/Bericht/Konferenzband › Konferenzbeitrag › Begutachtung

Originalsprache	Englisch
Titel	Laser Chemistry of Organometallics
Herausgeber*innen	J. Chaiken
Verlag	American Chemical Society
Seiten	250
Seitenumfang	23
Band	530
Publikationsstatus	Veröffentlicht - 1993

Name	ACS Symposium Series

Wissenschaftszweige

@inproceedings{564cc8dbaf164135925ae8b267a5367e,

title = "Reaction Kinetics and Simulation of Growth in Pyrolytic Laser-Induced Chemical Vapor Deposition",

author = "Dieter B{\"a}uerle and Nikita Arnold and R. Kullmer",

year = "1993",

language = "English",

volume = "530",

series = "ACS Symposium Series",

publisher = "American Chemical Society",

pages = "250",

editor = "\{J. Chaiken\}",

booktitle = "Laser Chemistry of Organometallics",

}