Production of Microstructures by Laser Pyrolysis

Publikation: Beitrag in Buch/Bericht/Konferenzband › Konferenzbeitrag › Begutachtung

Originalsprache	Englisch
Titel	Proc. MRS Symp. "Laser Diagnostics and Photochemical Processing for Semiconductor Devices"
Herausgeber*innen	R.M. Osgood et al.
Verlag	Elsevier-North Holland
Seiten	19
Seitenumfang	17
Band	17
Publikationsstatus	Veröffentlicht - 1983

Name	Proc. MRS Symp.

Wissenschaftszweige

@inproceedings{3a723f23b0ef424aa8a2f58972382548,

title = "Production of Microstructures by Laser Pyrolysis",

author = "Dieter B{\"a}uerle",

year = "1983",

language = "English",

volume = "17",

series = "Proc. MRS Symp.",

publisher = "Elsevier-North Holland",

pages = "19",

editor = "\{R.M. Osgood et al.\}",

booktitle = "Proc. MRS Symp. {"}Laser Diagnostics and Photochemical Processing for Semiconductor Devices{"}",

}