Particle manipulation using 3D ac electro-osmotic micropumps

We present a novel mechanism of particle manipulation in alternating-current (ac)- driven electro-osmotic micropumps, utilizing the tunable ratio of viscous drag, inertial and dielectrophoretic forces. The latter are induced by three-dimensional (3D) stepped electrode arrays in the channel, which are driven by ac voltages enabling so-called 3D-ac-electro-osmotic pumping, as has been proposed recently. Due to size- and density-dependent differences in polarizability, targeted particles in the fluid stream can be slowed down or even pinned above the electrode structures solely by adjusting the operation parameters of the pump. Hence the presented device, fabricated in SU-8/glass technology, enables simultaneous pumping and manipulation of particles in suspension.