On the spatial confinement in energy beam microprocessing

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

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@article{c8aadd8a19114dc58538ec6643ddce53,

title = "On the spatial confinement in energy beam microprocessing",

author = "Nikita Arnold",

year = "1995",

doi = "10.1063/1.359765",

language = "English",

volume = "78",

pages = "4805--4807",

journal = "Journal of Applied Physics",

issn = "1089-7550",

publisher = "American Institute of Physics",

number = "7",

}