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Novel Micromachined Vibrating Beam Sensor for the Viscosity Measurement of Complex Liquids

Publikation: Beitrag in Buch/Bericht/KonferenzbandKonferenzbeitragBegutachtung

Abstract

In this work we present a novel experimental setup for measuring liquid properties utilizing three different acoustic sensors. We compare the applicability and associated measurement results for electromagnetically excited cantilever and membrane or plate resonators, as well as a quartz crystal resonator. This work aims at comparing the characteristics of these different sensor principles. The setup combines suitable liquid reservoirs for all three sensors in a temperature-stabilized environment.
OriginalspracheEnglisch
TitelTagungsband zur Informationstagung Mikroelektronik 08
Seiten60-63
Seitenumfang4
PublikationsstatusVeröffentlicht - Okt. 2008

Wissenschaftszweige

  • 202036 Sensorik

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