@inproceedings{d6e5157c7fb647ad853a695f3d750050,
title = "Micromachined thermal conductivity sensor for the liquid phase",
keywords = "Thermal conductivity, Thermal sensors, Silicon, Biomembranes, Temperature sensors, Thermistors, Germanium, Amorphous materials, Sensor systems, Liquids",
author = "J. Kuntner and F. Kohl and B. Jakoby",
year = "2005",
doi = "10.1109/SENSOR.2005.1496481",
language = "English",
isbn = "0780389948",
volume = "1",
pages = "571--574",
booktitle = "The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.",
}