Laser-Induced Surface Modification and Etching of Materials

Publikation: Beitrag in Buch/Bericht/Konferenzband › Konferenzbeitrag › Begutachtung

Originalsprache	Englisch
Titel	Laser- and Particle-Beam Chemical Processing for Microelectronics
Herausgeber*innen	D.J. Ehrlich, G.S. Higashi, M.M. Oprysko
Seiten	411
Seitenumfang	10
Publikationsstatus	Veröffentlicht - 1988

Name	Materials Research Society

Wissenschaftszweige

@inproceedings{7ba31b983e654865b965935a161e1977,

title = "Laser-Induced Surface Modification and Etching of Materials",

author = "Dieter B{\"a}uerle and Michael Eyett and Ulrike Kolzer and R. Kullmer and Peter Mogyorosi and Klaus Piglmayer",

year = "1988",

language = "English",

series = "Materials Research Society",

pages = "411",

editor = "\{D.J. Ehrlich, G.S. Higashi, M.M. Oprysko\}",

booktitle = "Laser- and Particle-Beam Chemical Processing for Microelectronics",

}

TY - GEN

T1 - Laser-Induced Surface Modification and Etching of Materials

AU - Bäuerle, Dieter

AU - Eyett, Michael

AU - Kolzer, Ulrike

AU - Kullmer, R.

AU - Mogyorosi, Peter

AU - Piglmayer, Klaus

PY - 1988

Y1 - 1988

M3 - Conference proceedings

T3 - Materials Research Society

SP - 411

BT - Laser- and Particle-Beam Chemical Processing for Microelectronics

A2 - D.J. Ehrlich, G.S. Higashi, M.M. Oprysko, null

ER -