Laser-induced local CVD and simultaneous etching of Tungsten

Publikation: Beitrag in Fachzeitschrift › Konferenzartikel › Begutachtung

Wissenschaftszweige

@article{acd10b79eeec45f9a8a762cba994ea29,

title = "Laser-induced local CVD and simultaneous etching of Tungsten",

author = "Z. Toth and Klaus Piglmayer",

year = "2002",

month = jan,

day = "28",

doi = "10.1016/S0169-4332(01)00621-3",

language = "English",

volume = "186",

pages = "184--189",

journal = "Applied Surface Science",

issn = "1873-5584",

publisher = "Elsevier",

number = "1-4",

}

TY - JOUR

T1 - Laser-induced local CVD and simultaneous etching of Tungsten

AU - Toth, Z.

AU - Piglmayer, Klaus

PY - 2002/1/28

Y1 - 2002/1/28

UR - https://www.scopus.com/pages/publications/0037185130

U2 - 10.1016/S0169-4332(01)00621-3

DO - 10.1016/S0169-4332(01)00621-3

M3 - Conference article

SN - 1873-5584

VL - 186

SP - 184

EP - 189

JO - Applied Surface Science

JF - Applied Surface Science

IS - 1-4

ER -