Investigation of surface acoustic waves on LiNbO
            3, quartz, and LiTaO
            3 by laser probing

Investigation of surface acoustic waves on LiNbO ₃, quartz, and LiTaO ₃ by laser probing

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	Englisch
Seiten (von - bis)	123-127
Seitenumfang	5
Fachzeitschrift	Microelectronic Engineering
Volume	31
Ausgabenummer	1-4
DOIs	https://doi.org/10.1016/0167-9317(95)00334-7
Publikationsstatus	Veröffentlicht - Feb. 1996

@article{787f5a1615a2432b8ab06b9a6c8f1847,

title = "Investigation of surface acoustic waves on LiNbO 3, quartz, and LiTaO 3 by laser probing",

author = "Andreas Holm and Q. St{\"u}rzer and Robert Weigel and Y. Xu",

year = "1996",

month = feb,

doi = "10.1016/0167-9317(95)00334-7",

language = "English",

volume = "31",

pages = "123--127",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "ELSEVIER SCIENCE BV",

number = "1-4",

}

TY - JOUR

T1 - Investigation of surface acoustic waves on LiNbO 3, quartz, and LiTaO 3 by laser probing

AU - Holm, Andreas

AU - Stürzer, Q.

AU - Weigel, Robert

AU - Xu, Y.

PY - 1996/2

Y1 - 1996/2

UR - https://www.scopus.com/pages/publications/0030082677

U2 - 10.1016/0167-9317(95)00334-7

DO - 10.1016/0167-9317(95)00334-7

M3 - Article

SN - 0167-9317

VL - 31

SP - 123

EP - 127

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 1-4

ER -