Investigation of incubation in ArF excimer laser irradiated poly(methyl-methacrylate) using pulsed force mode atomic force microscopy

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@article{b3a9453f099f4d9c89359d9b5a1cd8dd,

title = "Investigation of incubation in ArF excimer laser irradiated poly(methyl-methacrylate) using pulsed force mode atomic force microscopy",

author = "Sabine Hild",

year = "2004",

month = nov,

day = "15",

doi = "10.1063/1.1803632",

language = "English",

volume = "96",

pages = "5548--5551",

journal = "Journal of Applied Physics",

issn = "1089-7550",

publisher = "American Institute of Physics",

number = "10",

}

TY - JOUR

T1 - Investigation of incubation in ArF excimer laser irradiated poly(methyl-methacrylate) using pulsed force mode atomic force microscopy

AU - Hild, Sabine

PY - 2004/11/15

Y1 - 2004/11/15

UR - https://www.scopus.com/pages/publications/10044243933

U2 - 10.1063/1.1803632

DO - 10.1063/1.1803632

M3 - Article

SN - 1089-7550

VL - 96

SP - 5548

EP - 5551

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 10

ER -