Influence of storage time on laser cleaning on SiO
            2 on Si

Influence of storage time on laser cleaning on SiO ₂ on Si

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

@article{ffacc082230d4f9dac96da27c6db0e8f,

title = "Influence of storage time on laser cleaning on SiO 2 on Si",

author = "Gernot Schrems and Marie-Pierre Delamare and Nikita Arnold and Paul Leiderer and Dieter B{\"a}uerle",

year = "2003",

month = mar,

doi = "10.1007/s00339-002-1761-5",

language = "English",

volume = "76",

pages = "847--849",

journal = "Applied Physics A",

issn = "1432-0630",

publisher = "Springer Verlag",

number = "5",

}

TY - JOUR

T1 - Influence of storage time on laser cleaning on SiO 2 on Si

AU - Schrems, Gernot

AU - Delamare, Marie-Pierre

AU - Arnold, Nikita

AU - Leiderer, Paul

AU - Bäuerle, Dieter

PY - 2003/3

Y1 - 2003/3

UR - https://www.scopus.com/pages/publications/0037356079

U2 - 10.1007/s00339-002-1761-5

DO - 10.1007/s00339-002-1761-5

M3 - Article

SN - 1432-0630

VL - 76

SP - 847

EP - 849

JO - Applied Physics A

JF - Applied Physics A

IS - 5

ER -