Influence of High Temperature Annealings on a-SiC:H Thin Film Properties

Publikation: Beitrag in Buch/Bericht/Konferenzband › Konferenzbeitrag › Begutachtung

Wissenschaftszweige

@inproceedings{ccf82c0fd15f470eb072bd44c76e9c69,

title = "Influence of High Temperature Annealings on a-SiC:H Thin Film Properties",

author = "Tobias Frischmuth and David Dergez and Marko St{\"u}begger and Ursula Hedenig and Thomas Grille and Ulrich Schmid",

year = "2014",

month = mar,

language = "English",

pages = "475--478",

booktitle = "Smart Systems Integration",

}