Fast thermopneumatic actuation of thin PDMS membranes for the use as microfluidic valves and pumps

In this paper we present a concept for fast thermopneumatic actuation of a thin PDMS membrane by the use of a piston-like head of liquid and a Peltierelement for controlling the temperature of the working fluid. By adjusting the temperature of the working fluid, in our case ethanol, the volumetric thermal expansion is controlled, which is in turn directly coupled to membrane deflection. Pinch-off and subsequent release of a microfluidic channel above the membrane is achieved in a few seconds. The proposed setup can be potentially utilized for the realization of fast microfluidic valves and pumps.